1.
Conference Proceedings
Kim,S.-K. ; Kim,Y.-S. ; Kim,J.-S. ; Bok,C.-K. ; Ham,Y.-M. ; Baik,K.-H.
Pub. info.:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA . Part1 pp.435-442, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
2.
Conference Proceedings
Kim,S.-K. ; Hong,J.-G. ; Park,J.-O. ; Yoo,T.-J. ; Hyun,Y.-S. ; Bok,C.-K. ; Shin,K.-S.
Pub. info.:
Optical Microlithography XIV . 4346 pp.214-221, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
3.
Conference Proceedings
Eom,T.-S. ; Hyun,Y.-S. ; Kim,C.-K. ; Bok,C.-K. ; Shin,K.-S.
Pub. info.:
Optical Microlithography XIV . 4346 pp.869-878, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346