1.

Conference Proceedings

Conference Proceedings
Aparicio, R. ; Birkmire, R. ; Pant, A. ; Huff, M. ; Russell, T.W.F.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.260-267,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Technical Paper

Technical Paper
Hepp, A. ; McNatt, J. ; Morel, D. ; Orbey, N. ; Birkmire, R. ; Newton, R.
Pub. info.: AIAA meeting papers on disc.  2004.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.: 2nd