1.

Conference Proceedings
Conference Proceedings
1. A novel depleted semi-insulating silicon material for high frequency applications
Johansson, M. ; Bengtsson, S.
Pub. info.: Progress in SOI structures and devices operating at extreme conditions.  pp.333-342,  2002.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 58
2.

Conference Proceedings
Conference Proceedings
2. Wafer Bonding: a Flexible Way to Manufacture SOI Materials for High Performance Applications (Invited)
Bengtsson, S. ; Amirfeiz, P. ; Johansson, M.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.241-252,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
3.

Conference Proceedings
Conference Proceedings
3. Hydrophobic Low Temperature Wafer Bonding; Void Formation in the Oxide-Free Interface
Amirfeiz, P. ; Sanz-Velasco, A. ; Bengtsson, S.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.267-277,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-19
4.

Conference Proceedings
Conference Proceedings
4. Wafer Bonding using Oxygen Plasma Treatment in RIE and ICP RIE
Sanz-Velasco, A. ; Amirfeiz, P. ; Bengtsson, S. ; Colinge, C.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.31-40,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-27
5.

Conference Proceedings
Conference Proceedings
5. A Si/SiO2/Si Heteroatructure Barrier Varactor Diode Made by Wafer Bonding
Bengtsson, S.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.205-213,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-27
6.

Technical Paper
Technical Paper
6. High Performance Planetary Gears for Heavy Duty Automotive Transmissions.
Engstrom, U. ; Forden, L. ; Bengtsson, S. ; Bergstrom, M.
Pub. info.: 2005 Commercial Vehicle Engineering Congress and Exhibition : SAE technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005