1.

Conference Proceedings
Conference Proceedings
1. WITH WAFERS WITH NITROGEN DOPED SUBSTRATES AND THEIR GETTERING BEHAVIOR
Sebmolke, R. ; Blietz, M. ; Hoelzl, R. ; Menzel, D. ; Bender, H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.658-669,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. BULK MICRO DEFECTS OF P/P- EPITAXIAL SILICON WITH WAFERS WITH NITROGEN DOPED SUBSTRATES AND THEIR GETTERING BEHAVIOR
Schmolke, R. ; Blietz, M. ; Hoelzl, R. ; Menzel, D. ; Bender, H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.658-669,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings
Conference Proceedings
3. Power scale-up of the extreme-ultraviolet electric capillary discharge source
Fornaciari, N.R. ; Bender, H. ; Buchenauer, D. ; Dimkoff, J.L. ; Kanouff, M.P. ; Karim, S. ; Romeo, C. ; Shimkaveg, G.M. ; Silfvast, W.T. ; Stewart, K.D.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.110-121,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688