1.

Conference Proceedings
Conference Proceedings
1. Low Dielectric Polymer Etching with Downstream Microwave Plasma
Callahan, R. ; Raupp, G. ; Beaudoin, S.
Pub. info.: Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium.  pp.32-37,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-7
2.

Conference Proceedings
Conference Proceedings
2. Von Mises Stress in CMP Processes
Wang, D. ; Beaudoin, S. ; Cale, T.S. ; Lee, J. ; Holland, K. ; Bibby, T.
Pub. info.: Proceedings of the First International Symposium on Chemical Mechanical Planarization.  pp.97-109,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-22