1.

Conference Proceedings
Conference Proceedings
1. Characterization and application of deep Si trench etching
Fleming,J.G. ; Barron,C.C.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.73-79,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
2.

Conference Proceedings
Conference Proceedings
2. Novel silicon fabrication process for high-aspect-ratio micromachined parts
Fleming,J.G. ; Barron,C.C.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.185-190,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639
3.

Conference Proceedings
Conference Proceedings
3. Integrated mold/surface-micromachining process
Barron,C.C. ; Fleming,J.G. ; Montague,S. ; Sniegowski,J.J. ; Hetherington,D.L.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.30-35,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of large-area gratings with submicron pitch using mold micromachining
Fleming,J.G. ; Barron,C.C. ; Stallard,B.R. ; Kaushik,S.
Pub. info.: Micromachining and Imaging.  pp.7-14,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3009