1.

Conference Proceedings
Conference Proceedings
1. Critical States of Stress Evolution in Silicon Structures of ULSI with Shallow Trench Isolation
Peidous, I.V. ; Balasubramanian, N. ; Johnson, E. ; Gan, C.H. ; Sundaresan, R.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.243-254,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. PASSIVATION OF SURFACE AND BULK DEFECTS IN InP
Balasubramanian, Sathya ; Kumar, Vikram ; Balasubramanian, N. ; Premachandran, V.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.413-418,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262