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15 results

Conference Proceedings

1. The Role of Vacancies and Dopants in Si Solid-Phase Epitaxial Crystallization

Atwater, H. A. ; Chen, CM. ; Gessmann, T. ; Lynn, K. G. ; Petkov, M. P. ; Rassiga, S. ; Weber, M. H.

Pub. info.:	Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.. pp.183-188, 1999. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	557

Conference Proceedings

2. INTERDIFFUSION KINETICS AND MAGNETIC PROPERTIES OF Ta-PERMALLOY MULTILAYERS

Hashim, I. ; Atwater, H. A. ; Kung, K. T. Y. ; Valleta, R. M.

Pub. info.:	Magnetic materials: microstructure and properties : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.159-164, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	232

Conference Proceedings

3. SUPPRESSION OF ISLAND FORMATION DURING INITIAL STAGES OF Ge/Si(100) GROWTH BY ION-ASSISTED MOLECULAR BEAM EPITAXY

Tsai, C. J. ; Atwater, H. A.

Pub. info.:	Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.127-132, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	268

Conference Proceedings

4. Ambient Dependence of Agglomeration Stability of Cu/Ta Films

Hartman, J. W. ; Atwater, H. A. ; Hashim, Imran ; Chin, Barry ; Chen, Fusen

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.303-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

5. RAPID SELECTIVE ANNEALING OF Cu THIN FILMS ON Si USING MICROWAVES

Brain, R. A. ; Atwater, H. A. ; Barmatz, M.

Pub. info.:	Microwave processing of materials IV : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.519-, 1994. Pittsburgh,, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	347

Conference Proceedings

6. CORRELATION OF SIZE AND PHOTOLUMINESCENCE FOR Ge NANOCRYSTALS IN SiO2 MATRICES

Yang, C. M. ; Shcheglov, K. V. ; Brongersma, M. L. ; Polman, A. ; Atwater, H. A.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.181-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	358

Conference Proceedings

7. IN SITU ANALYSIS OF MAGNETIC AND STRUCTURAL PROPERTIES OF EPITAXIAL AND POLYCRYSTALLINE Ni80Fe20 THIN FILMS

Hashim, I. ; Atwater, H. A.

Pub. info.:	Magnetic ultrathin films : multilayers and surfaces, interfaces and characterization : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.363-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	313

Conference Proceedings

8. Agglomeration of Cu Electroplating Seed Layers on Ultra-Thin Ta, Ta1-xNx, Ta1-xOx, Contaminated Ta, and Composite Ta/Ta1-xNx Diffusion Barriers

Hartman, J. W. ; Yeh, H. ; Atwater, H. A. ; Hashim, I.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.257-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

9. Efficient Luminescence From GaAs Nanocrystals in SiO2 Matrices

Kanemitsu, Y. ; Tanaka, H. ; Mimura, S. ; Okamoto, S. ; Kushida, T. ; Min, K. S. ; Atwater, H. A.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.223-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	536

10.

Conference Proceedings

10. The Effect of Grain Boundaries on Surface Diffusion Mediated-Planarization of Polycrystalline Cu Films

Brain, R. A. ; Gardner, D. S. ; Fraser, D. B. ; Atwater, H. A.

Pub. info.:	Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.107-, 1995. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	389

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