1.

Conference Proceedings

Conference Proceedings
Aswendt, P. ; Hofling, R. ; Hiller, K.
Pub. info.: Microsystems Metrology and Inspection.  pp.165-173,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825
2.

Conference Proceedings

Conference Proceedings
Holstein, D. ; Aswendt, P. ; Hofling, R. ; Schmidt, C.D. ; Juptner, W.
Pub. info.: International Conference on Applied Optical Metrology.  pp.429-436,  1998.  Bellingham, Wash..  SPIE--International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3407