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16 results

Conference Proceedings

1. Low-k Dielectric Obtained by Noble Gas Implantation in Silicon Oxide

Assaf, H. ; Ntsoenzok, E. ; Ruault, M-O. ; Ashok, S.

Pub. info.:	Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.439-444, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	914

Conference Proceedings

2. Boron Implantation Into Silicon Subject To Hydrogen Plasma

Rangan, Sanjay ; Horn, Mark ; Ashok, S.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B5.7-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	610

Conference Proceedings

3. He-induced Nanocavities for the Gettering of Metallic Impurities in Silicon

Ntsoenzok, E. ; Delamare, R. ; Alquier, D. ; Liu, C.L. ; Ashok, S. ; Ruault, M.O.

Pub. info.:	High purity silicon VIII : proceedings of the international symposium. pp.202-207, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-05

Conference Proceedings

4. Study Of Er-Related Defects In A-Si:H:Er Films Used In Light Emitting Heterostructures

Nazarov, A. ; Vovk, Ja. ; Lysenko, V. ; Kon’kov, O. ; Terukov, E. ; Ashok, S.

Pub. info.:	Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.145-152, 2002. Warrendale, Pa. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	719

Conference Proceedings

5. Trapping And Detrapping Of H In Si: Impact On Diffusion Properties And Solar Cell Processing

Sopori, Bhushan ; Zhang, Y. ; Reedy, R. ; Jones, K. ; Ravindra, N.M. ; Rangan, S. ; Ashok, S.

Pub. info.:	Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.125-132, 2002. Warrendale, Pa. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	719

Conference Proceedings

6. Influence of Hydrogen Plasma Treatment on He Implantation-Induced Nanocavities in Silicon

Vengurlekar, A. ; Ashok, S. ; Liu, C.L. ; Ntsoenzok, E. ; Barthe, M.F. ; Desgardin, P. ; Ruault, M.O.

Pub. info.:	Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.. pp.183-188, 2004. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	792

Conference Proceedings

7. Electrical Signature Of Ion-Implantation Induced Defects In N-Silicon In The Defect Cluster Regime Studied Using Dlts And Isothermal Transient Spectroscopies

Singh, Samarendra P. ; Rao, Vineet ; Mohapatra, Y.N. ; Rangan, Sanjay ; Ashok, S.

Pub. info.:	Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.303-310, 2002. Warrendale, Pa. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	719

Conference Proceedings

8. Enhancement of Boron Activation in Shallow Junctions by Hydrogen

Vengurlekar, A. ; Ashok, S. ; Kalnas, C.E. ; Theodore, N.D.

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.325-332, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

9. Blistering and Splitting in Hydrogen-Implanted Silicon

Ntsoenzok, E. ; Assaf, H. ; Ashok, S.

Pub. info.:	Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.405-412, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	864

10.

Conference Proceedings

10. Helium-Induced Nanocavities in Silicon : Formation and Properties

Rangan, Sanjay ; Ashok, S. ; Chen, G. ; Theodore, D.

Pub. info.:	Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001). VOL-1 pp.255-261, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4746

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