1.

Conference Proceedings
Conference Proceedings
1. CONTROL OF SOLID-EXCITATION-BASED PHOTOCHEMICAL DRY ETCHING OF SEMICONDUCTORS BY ION-BOMBARDMENT-INDUCED DAMAGE
Ashby, C. I. H. ; Myers, D. R.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.429-434,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings
Conference Proceedings
2. CONTROL OF ETCHING OF LiNbO3 BY IMPLANT DAMAGE PROFILE TAILORING
Brannon, P. J. ; Ashby, C. I. H. ; Arnold, G. W.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.469-476,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101