1.

Conference Proceedings
Conference Proceedings
1. Defects induced by heavy-metal on bonded SOI wafer surfaces
Okonogi, K. ; Kikuchi, H. ; Arai, K.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.38-43,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
2.

Conference Proceedings
Conference Proceedings
2. Oxygen Precipitate Distribution in Bonded SOI Wafers
Okonogi, K. ; Kikuchi, H. ; Arai, K.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.290-295,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7