Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

11 results

Conference Proceedings

1. ZnTe and CdTe Epitaxial Growth by MOCYD using Plasma Hydrogen Radical

Hatanaka, Y. ; Noda, D. ; Niraula, M. ; Aoki, T. ; Nakanishi, Y.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1027-1033, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

2. Preparation of High Quality SiNx Films Deposited by Remote Plasma CVD by Using TDMAS

Aoki, T. ; Ogishima, T. ; Nakanishi, Y. ; Hatanaka, Y. ; Wrobel, A.M.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1207-1214, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

3. Range and Damage Distribution in Cluster Ion Implantation

Yamada, I. ; Matsuo, J. ; Jones, E. C. ; Takeuchi, D. ; Aoki, T. ; Goto, K. ; Sugii, T.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.363-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

4. Dopant Segregation to {311} Defects During Low-Temperature Annealing

Taniguchi, K. ; Saito, T. ; Xia, J. ; Kim, R. ; Aoki, T. ; Kobayashi, H. ; Kamakura, Y.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.155-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

5. Phosphorus Diffusion From Doped Si1-xGex Films Into Silicon

Kobayashi, S. ; Iizuka, M. ; Aoki, T. ; Mikoshiba, N. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.265-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

6. Preparation of SiC Thin Film Using Organosilicon by Remote Plasma CVD Method

Xu, Y-Y. ; Muramatsu, T. ; Aoki, T. ; Nakanishi, Y. ; Hatanaka, Y.

Pub. info.:	Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.. pp.185-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	544

Conference Proceedings

7. Computer Simulation of Annealing After Cluster Ion Implantation

Insepov, Z. ; Aoki, T. ; Matsuo, J. ; Yamada, I.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.147-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

Conference Proceedings

8. Porous Silicon Oxynitride Films Derived From Polysilazane as a Novel Low-Dielectric Constant Material

Aoki, T. ; Kikkawa, T. ; Shimizu, Y.

Pub. info.:	Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.41-48, 1999. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	565

Conference Proceedings

9. Size Dependence of Bombardment Characteristics Produced by Cluster Ion Beams

Seki, T. ; Tanomura, M. ; Aoki, T. ; Matsuo, J. ; Yamada, I.

Pub. info.:	Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.. pp.93-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	504

10.

Conference Proceedings

10. Radical Assited MOCVD For ZnSe Crystal Growth on Si and GaAs Substrates

Aoki, T. ; Morita, M. ; Nakanishi, Y. ; Hatanaka, Y.

Pub. info.:	Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition. pp.354-359, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-5

11 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by: