Carr, Kevin F. ; Carlson, N. ; Weitzman, P. ; Sopori, B. L. ; Marshall, C. ; Allen, L.
Pub. info.:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.579-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.459-464, 1994. Pennington, NJ. Electrochemical Society