Savage, T. S. ; Xu, P. ; Ai, R. ; Dunn, D. ; Marks, L. D.
Pub. info.:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.495-500, 1992. Pittsburgh, Pa.. Materials Research Society
Ai, R. ; Savage, T. S. ; Xu, P. ; Zhang, J. P. ; Marks, D.
Pub. info.:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.259-264, 1992. Pittsburgh, Pa.. Materials Research Society
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.425-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.123-131, 1997. Pennington, NJ. Electrochemical Society