1.

Conference Proceedings
Conference Proceedings
1. Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering
Adams, D.P. ; Benavides, G.L. ; Vasile, M.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.201-206,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
2.

Conference Proceedings
Conference Proceedings
2. Laser Machining With Ultrashort Pulses: Effects of Pulse-Width, Frequency and Energy
Bliss, D.E. ; Adams, D.P. ; Cameron, S.M. ; Luk, T.S.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.81-84,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546