1.

Technical Paper
Technical Paper
1. Studies on Lead-free Resin Overlay for Engine Bearings.
Tanaka, T. ; Naka, I. ; Abe, T. ; Ono, A. ; Iwata, H. ; Sugimura, H.
Pub. info.: 2006 SAE world congress : technical paper.  2006.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2006
2.

Conference Proceedings
Conference Proceedings
2. Process development for EUV mask production [6349-131]
Abe, T. ; Fujii, A. ; Sasaki, S. ; Mohri, H. ; Hayashi, N. ; Shoki, T. ; Yamada, T. ; Nozawa, O. ; Ohkubo, R. ; Ushida, M.
Pub. info.: Photomask Technology 2006.  pp.63493G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Development of C02 laser produced Xe plasma EUV light source for microlithography [6151-27]
Mizoguchi, H. ; Endo, A. ; Arigo, T. ; Miura, T. ; Hoshino, H. ; Ueno, Y. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Abe, T. ; Suganuma, T. ; Soumagne, G. ; Someya, H. ; Takabayashi, Y. ; Toyoda, K.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
4.

Conference Proceedings
Conference Proceedings
4. EUV mask development status at ASET and DNP [6283-92]
Abe, T. ; Fujii, A. ; Mohri, H. ; Hayashi, N. ; Tanaka, Y. ; Nishiyama, I.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62830H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283