Soumagne, G. ; Abe, T. ; Ikeda, K. ; Komori, H. ; Someya, H. ; Suganuma, T. ; Nakajima, K. ; Endo, A.
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Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.274-277, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
X-ray sources and optics : 2-3 August 2004, Denver, Colorado, USA. pp.1-10, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Suganuma, T. ; Abe, T. ; Komori, H. ; Takabayashi, Y. ; Endo, A.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.367-372, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Komori, H. ; Imai, Y. ; Soumagne, G. ; Abe, T. ; Suganuma, T. ; Endo, A.
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Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.272-278, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Soumagne, G. ; Abe, T. ; Suganuma, T. ; Imai, Y. ; Someya, H. ; Hoshino, H. ; Nakano, M. ; Komori, H. ; Takabayashi, Y. ; Ariga, T. ; Ueno, Y. ; Wada, Y. ; Endo, A. ; Toyoda, K.
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Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.227-235, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Endo, A. ; Abe, T. ; Suganuma, T. ; Imai, Y. ; Someya, H. ; Hoshino, H. ; Masaki, N. ; Soumagne, G. ; Komori, H. ; Takabayashi, Y. ; Mizoguchi, H.
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Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA. pp.256-262, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Mizoguchi, H. ; Endo, A. ; Arigo, T. ; Miura, T. ; Hoshino, H. ; Ueno, Y. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Abe, T. ; Suganuma, T. ; Soumagne, G. ; Someya, H. ; Takabayashi, Y. ; Toyoda, K.
Pub. info.:
Emerging Lithographic Technologies X. pp.61510S-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Abe, T. ; Suganuma, T. ; Imai, Y. ; Someya, H. ; Hoshino, H. ; Nakano, M. ; Soumagne, G. ; Komori, H. ; Takabayashi, Y. ; Mizoguchi, H. ; Endo, A. ; Toyoda, K. ; Horiike, Y.
Pub. info.:
Emerging Lithographic Technologies VIII. pp.160-167, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering