1.

Conference Proceedings
Conference Proceedings
1. FORMATION OF BURIED TiSi2 LAYERS IN SINGLE CRYSTAL SILICON BY ION IMPLANTATION
Madakson, P. ; Clark, G. J. ; Legoues, F. K. ; d'Heurle, F. M. ; Baglin, J. E. E.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.281-286,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. 70 Reactive Diffusion in the Ni-Si System: Influence of Ni Thickness on the Phase Formation Sequence
Coia, C. ; Lavoie, C. ; d'Heurle, F. M. ; Desjardins, P. ; Detavernier, C. ; Kellock, A. J. (Invited Paper)
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.585-596,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
3.

Conference Proceedings
Conference Proceedings
3. Nucleation phenomena in transitions from two to three phases, diffusion couples, phase stability, the thin film formation of some silicides
d'Heurle, F. M.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.3-8,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25
4.

Conference Proceedings
Conference Proceedings
4. EFFECT OF AN INTERFACIAL Ti LAYER ON THE FORMATION OF CoSi2 ON Si
Barmak, K. ; Clevenger, L. A. ; Agnello, P. D. ; Ganin, E. ; Copel, M. ; Dehaven, P. ; Falta, J. ; d'Heurle, F. M. ; Cabral Jr., C.
Pub. info.: Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.575-580,  1992.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 238
5.

Conference Proceedings
Conference Proceedings
5. Wet and Dry Oxidation of Polycrystalline SixGe1-x Films
Hellberg, P-E. ; Zhang, S-L. ; d'Heurle, F. M. ; Petersson, C. S.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.111-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
6.

Conference Proceedings
Conference Proceedings
6. Phase Formation in Cu(Sn) Alloy Thin Films
Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.133-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
7.

Conference Proceedings
Conference Proceedings
7. Theoretical Considerations about Phase Growth and Phase Formation
d'Heurle, F. M.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.3-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
8.

Conference Proceedings
Conference Proceedings
8. Interface Stability of Ti(Si1-yGey)2 and Si1-xGex Alloys
Aldrich, D. B. ; d'Heurle, F. M. ; Sayers, D. E. ; Nemanich, R. J.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.21-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
9.

Conference Proceedings
Conference Proceedings
9. ROOM TEMPERATURE OXIDATION OF SILICON CATALYZED BY Cu3Si
Harper, J. M. E. ; Charai, A. ; Stolt, L. ; d'Heurle, F. M. ; Fryer, P. M.
Pub. info.: Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A..  pp.107-112,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 187
10.

Conference Proceedings
Conference Proceedings
10. ION BEAM IRRADIATION OF METAL FILMS ON SiD2
Clark, G. J. ; Baglin, J. E. E. ; d'Heurle, F. M. ; White, C. W. ; Farlow, G. ; Narayan, J.
Pub. info.: Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.55-60,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 27