1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Structure and Reactivity of Fe(III)TPP-Oxygen-Skatole Ternary Complex in Triptophan Dioxygenase Model Reaction System
Tajima, K. ; Yoshino, M. ; Edo, T. ; Ishizu, K. ; Ohya-Nishiguchi, H.
Pub. info.: Dioxygen activation and homogeneous catalytic oxidation : proceedings of the Fourth International Symposium on Dioxygen Activation and Homogeneous Catalytic Oxidation.  pp.445-,  1991.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 66
3.

Conference Proceedings
Conference Proceedings
3. Formation of Diffusion Barrier Layer on Low-k Material Using Wet Fabrication Process
Yoshino, M. ; Yokoshima, T. ; Osaka, T. ; Hashimoto, A. ; Hagiwara, Y. ; Sato, I.
Pub. info.: Electrochemical processes in ULSI and MEMS : proceedings of the international symposium.  pp.251-263,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-17
4.

Conference Proceedings
Conference Proceedings
4. The Proposal of All-Wet Fabrication Process for ULSI Interconnects Technologies - Application of Electroless NiB Deposition to Capping and Barrier Layers
Yoshino, M. ; Nonaka, Y. ; Yokoshima, T. ; Osaka, T.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.137-145,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
5.

Conference Proceedings
Conference Proceedings
5. Characteristics of Electron Density Distributions in Metal Oxides
Morinaga, M. ; Yoshino, M. ; Shimode, A. ; Okabayashi, K. ; Nakamatsu, H. ; Sekine, R.
Pub. info.: Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003.  pp.77-80,  2004.  Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 449-452
6.

Conference Proceedings
Conference Proceedings
6. Energetics of Native Defects in Al2O3 and SiO2
Yoshino, M. ; Shinzato, Y. ; Morinaga, M.
Pub. info.: Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003.  pp.713-716,  2004.  Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 449-452
7.

Technical Paper
Technical Paper
7. Response surface Modeling of Diesel Spray Parameterized by Geometries Inside of Nozzle.
Kurimoto, N. ; Suzuki, M. ; Yoshino, M. ; Nishijima, Y.
Pub. info.: 2011 SAE world congress : technical paper.  2011.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2011
8.

Conference Proceedings
Conference Proceedings
8. Ultra line-narrowed ArF excimer laser G42A for sub-90-nm lithography generation
Saito, T. ; Suzuki, T. ; Yoshino, M. ; Wakabayashi, O. ; Matsunaga, T. ; Fujimoto, J. ; Kakizaki, K. ; Yamazaki, T. ; Inoue, T. ; Terashima, K. ; Enami, T. ; Inoue, H. ; Sumitani, A. ; Tomaru, H. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1704-1711,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
9.

Conference Proceedings
Conference Proceedings
9. Highly durable 4-kHz ArF excimer laser G42A for sub-90-nm lithography
Saito, T. ; Inoue, H. ; Nagano, H. ; Yoshino, M. ; Wakabayashi, O. ; Nohdomi, R. ; Nishisaka, T. ; Sumitani, A. ; Tomaru, H. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVII.  pp.1727-1734,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377