1.

Conference Proceedings
Conference Proceedings
1. Simulation technique for the PR flow process using a new viscous flow model
Chung, W.-Y. ; Kim, T.-K. ; Yoon, J.-Y. ; Kim, H.-W. ; Park, Y.-K. ; Kong, J.-T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.975-982,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
2.

Conference Proceedings
Conference Proceedings
2. Strategy for sub-80-nm contact hole patterning considering device fabrication
Yoon, J.-Y. ; Hata, M. ; Hah, J.-H. ; Kim, H.-W. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.196-204,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376