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14 results

Conference Proceedings

1. OAI and PSM used in 193-nm lithography

Yao,H. ; Luo,X. ; Chen,X. ; Feng,B.

Pub. info.:	Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland. pp.253-260, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3741

Conference Proceedings

2. Method to devise multiphase complex mask in submicron lithography

Luo,X. ; Yao,H.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part2 pp.987-994, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

Conference Proceedings

3. New method for improving the practical resolution of complex patterns in sub-half-micron lithography

Chen,X. ; Luo,X. ; Yao,H. ; Xiao,Q. ; Yu,G.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.567-578, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

4. DEVise and the Java Screen:visualization on the web

Yao,H. ; Wenger,K. ; Livny,M.

Pub. info.:	Visual data exploration and analysis VII : 24-26 January 2000, San Jose, California. pp.375-384, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3960

Conference Proceedings

5. Polycyanurate ester resins with low loss and low birefringence for use in integrated optics

Dreyer,C.J. ; Bauer,M. ; Bauer,J. ; Keil,N. ; Yao,H. ; Zawadzki,C.

Pub. info.:	Linear and nonlinear optics of organic materials : 1-2 August 2001, San Diego, USA. pp.188-199, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4461

Conference Proceedings

6. New mask having functions of OAI and PSM to realize sub-0.2-ｦﾌm patterns with 248 nm in microlithography

Luo,X. ; Yao,H. ; Chen,X. ; Feng,B.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.745-749, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

7. Simpler attenuated phase-shifting mask

Zhang,J. ; Feng,B. ; Hou,D. ; Zhou,C. ; Yao,H. ; Guo,Y. ; Chen,F. ; Sun,F. ; Su,P.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1175-1178, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

8. Measurement of surface profile of microstructure

Zhou,M. ; Bai,L. ; Li,Z. ; Yao,H.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.863-869, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

9. Optimized design of the light outlet of optical fiber large-screen display

Shen,S. ; Yao,H. ; Shen,Y. ; Fan,R.

Pub. info.:	Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China. pp.305-309, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3557

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Technical Paper

10. The Effect of the Porous Diverter Fairing on the Aerodynamic Performance of Natural Blockage Thrust Reverser

Yao,H. ; Cooper,R. ; Benard, E. ; Raghunathan, S. ; Tweedie, J. ; Riordan, D.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.:	42nd

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