Wang, J.G. ; Stahley, M.E. ; Pantano, C.G. ; Yang, D.H. ; Anderson, T. ; Kuhn, L.
Pub. info.:
Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.85-90, 2002. Warrendale, Pa.. Materials Research Society