1.

Conference Proceedings
Conference Proceedings
1. Visible light point-diffraction interferometer for testing of EUVl optics [6151-14]
Takeuchi, S. ; Kakuchi, O. ; Yamazoe, K. ; Gomei, Y. ; Decker, T. A. ; Johnson, M. A. ; Phillion, D. W. ; Taylor, J. S.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
2.

Conference Proceedings
Conference Proceedings
2. Challenging the limit of single mask exposure
Yamazoe, K. ; Hasegawa, M. ; Saitoh, K. ; Suzuki, A.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1601-1612,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings
Conference Proceedings
3. New resolution enhancement method realizing the limit of single mask exposure
Yamazoe, K. ; Hasegawa, M. ; Saitoh, K. ; Suzuki, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.471-482,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of IDEALSmile for 90-nm FLASH memory contact holes imaging with ArF scanner
Cantu, P. ; Capetti, G. ; Loi, S. ; Lupo, M. ; Pepe, A. ; Saitoh, K. ; Yamazoe, K. ; Hasegawa, Y. ; Iwasa, J. ; Toublan, O.R.
Pub. info.: Optical Microlithography XVII.  pp.859-871,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377