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13 results

Conference Proceedings

1. Modification of SiO2/4H-SiC Interface Properties by High-Pressure H2O Vapor Annealing

D. Takeda ; H. Yano ; T. Hatayama ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.663-666, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

Conference Proceedings

2. Sloped Sidewalls in 4H-SiC Mesa Structure Formed by a Cl2-O2 Thermal Etching

S. Takenami ; T. Hatayama ; H. Yano ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.733-736, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

Conference Proceedings

3. Low-Temperature Crystallization of Amorphous Si Films Using Ferritin Protein with Ni Nanoparticles

Y. Uraoka ; H. Kirimura ; T. Fuyuki ; M. Okuda ; I. Yamashita

Pub. info.:	Thin Film Transistor Technology 8. pp.195-201, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

4. Room-Temperature Sputter-Deposited Gate SiO₂ Films for High Quality Poly-Si TFTs

T. Serikawa ; T. Miyamoto ; H. Ueno ; Y. Sugawara ; Y. Uraoka

Pub. info.:	Thin Film Transistor Technology 8. pp.107-112, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

5. Development of ALD/PECVD Reactor for High Quality LTPS-TFTs Insulator

K. Murata ; N. Miyatake ; Y. Mori ; H. Tachibana ; Y. Uraoka

Pub. info.:	Thin Film Transistor Technology 8. pp.101-106, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

6. Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

Y. Sugawara ; Y. Uraoka ; H. Yano ; T. Hatayama ; T. Fuyuki

Pub. info.:	Thin Film Transistor Technology 8. pp.173-178, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

7. Criteria for Accurate Measurement of Charge-Pumping Current in 4H-SiC MOSFETs

D. Okamoto ; H. Yano ; T. Hatayama ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007. pp.747-750, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	600-603

Conference Proceedings

8. Anisotropic Etching of SiC in the Mixed Gas of Chlorine and Oxygen

T. Hatayama ; T. Shimizu ; H. Yano ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007. pp.659-662, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	600-603

Conference Proceedings

9. Increased Channel Mobility in 4H-SiC UMOSFETs Using On-Axis Substrates

H. Yano ; H. Nakao ; T. Hatayama ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.807-810, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

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Conference Proceedings

10. Significant Decrease of the Interface State Density by NH3 Plasma Pretreatment at 4H-SiC (000-1) Surface and its Bond Configuration

Y. Iwasaki ; H. Yano ; T. Hatayama ; Y. Uraoka ; T. Fuyuki

Pub. info.:	Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009. pp.503-506, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	645-648

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Author: Y. Uraoka