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Conference Proceedings

1. Advanced new OPC method to improve OPC accuracy for sub-90nm technology

J. Choi ; J. Kang ; Y. Shim ; K. Yun ; J. Hong ; Y. Lee ; K. Kim

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520

Conference Proceedings

2. Methodology to set up accurate OPC model using optical CD metrology and atomic force microscopy

Y. Shim ; J. Kang ; S. Lee ; J. Kim ; K. Kim

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

3. A precise pointing technique for free space optical links and networks using kinematic GPS and local sensors

Y. Shim ; S. D. Milner ; C. C. Davis

Pub. info.:	Free-space laser communications VII : 28-30 August 2007, San Diego, California, USA. pp.67090G-1-67090G-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6709

Conference Proceedings

4. Improvement on OPC completeness through pre-OPC hot spot detection and fix

Y. Shim ; J. Choi ; J. Kim ; B. Su ; P. Zhang

Pub. info.:	Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA. pp.692513-1-692513-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6925