1.

Conference Proceedings

Conference Proceedings
Zhang, W.P. ; Chen, W.Y. ; Chen, X.M. ; Wu, X.S. ; Xu, Z.F.
Pub. info.: MEMS/MOEMS Technologies and Applications.  pp.276-281,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4928
2.

Conference Proceedings

Conference Proceedings
Wu, X.S. ; Chen, W.Y. ; Zhang, W.P.
Pub. info.: MEMS/MOEMS Technologies and Applications.  pp.113-117,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4928