1.

Conference Proceedings

Conference Proceedings
Wang,C. ; Hu,X. ; Wong,T.K.S.
Pub. info.: Design, fabrication, and characterization of photonic devices : 30 November-3 December 1999, Singapore.  pp.484-491,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3896
2.

Conference Proceedings

Conference Proceedings
Buddhudu,S. ; Morita,M. ; Zhang,H.X. ; Kam,C.H. ; Lam,Y.L. ; Zhou,Y. ; Wong,T.K.S. ; Chan,Y.C. ; Ooi,B.S. ; Ng,S.L. ; Que,W.
Pub. info.: Design, fabrication, and characterization of photonic devices : 30 November-3 December 1999, Singapore.  pp.459-465,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3896
3.

Conference Proceedings

Conference Proceedings
Hu,X. ; Wong,T.K.S. ; Gao,S. ; Liu,H.M. ; Lam,Y.L. ; Chan,Y.C. ; Xu,F.L.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.57-65,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183
4.

Conference Proceedings

Conference Proceedings
Lee,S. ; Feng,X. ; Zhang,G.X. ; Lee,P. ; Liu,M.H. ; Serban,A. ; Springham,S.V. ; Wong,T.K.S. ; Wira,K. ; Selvam,C. ; Thang,A.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.123-127,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183
5.

Conference Proceedings

Conference Proceedings
Lee,S. ; Lee,P. ; Zhang,G.X. ; Feng,X. ; Serban,A. ; Liu,M.H. ; Wong,T.K.S. ; Selvam,C. ; Thang,A.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.112-122,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183
6.

Conference Proceedings

Conference Proceedings
Loh,S.Y. ; Wong,T.K.S. ; Tse,M.S. ; Goh,W.L.
Pub. info.: Micromachining and Microfabrication.  pp.231-240,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230