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16 results

Conference Proceedings

1. Evaluation of electron-beam stabilization for ion implant processing

Buffat, S. J. ; Kickel, B. ; Philipps, B. ; Adams, J. ; Ross, M. F. ; Minter, J. P. ; Marlowe, T. ; Wong, S. S.

Pub. info.:	Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1157-1174, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3678

Conference Proceedings

2. PLANARIZED COPPER INTERCONNECTS BY SELECTIVE ELECTROLESS PLATING

Kiang, M.H. ; Tao, J. ; Namgoong, W. ; Hu, C. ; Lieberman, M. ; Cheung, N. W. ; Kang, H.-K. ; Wong, S. S.

Pub. info.:	Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.187-198, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	265

Conference Proceedings

3. Copper Electroplating for Damascene ULSI Interconnects

Dubin, V. M. ; Lopatin, S. ; Chen, S. ; Cheung, R. ; Ryu, C. ; Wong, S. S.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.275-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

4. Evaluation of Copper Penetration in Low-ｦﾊ Polymer Dielectrics by Bias-Temperature Stress

Loke, A. L. S. ; Wong, S. S. ; Talwalkar, N. A. ; Wetzel, J. T. ; Townsend, P. H. ; Tanabe, T. ; Vrtis, R. N. ; Zussman, M. P. ; Kumar, D.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.535-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

5. Formation and High Frequency CV-Measurements of Aluminum/Aluminum Nitride/6H Silicon Carbide Structures

Zetterling, C.-M. ; Wongchotigul, K. ; Spencer, M. G. ; Harris, C. I. ; Wong, S. S. ; Ostling, M.

Pub. info.:	III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.. pp.667-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	423

Conference Proceedings

6. In Vivo Evaluation of Pulsed Laser Deposited Hydroxyapatite Coating for Prosthesis-Bone Bonding

Cotell, C. M. ; Conklin, J. A. ; Auyeung, R. C. Y. ; Wong, S. S. ; Klapperich, C. M. ; Soector, M.

Pub. info.:	Thin films and surfaces for bioactivity and biomedical applications : symposium held November 28-29, 1995, Boston, Massachussetts, U.S.A.. pp.171-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	414

Conference Proceedings

7. Microstructure and Mechanical Properties of Electroplated Cu Films for Damascene ULSI Metallization

Dubin, V. M. ; Morales, G. ; Ryu, C. ; Wong, S. S.

Pub. info.:	Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.137-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	505

Conference Proceedings

8. Advanced technology trends for astronomy at Rockwell Scientific

Wong, S. S. ; Loose, M. ; Piquette, E. C. ; Garnett, J. D. ; Zandian, M. ; Farris, M. C.

Pub. info.:	Optical and infrared detectors for astronomy : 21-22 June 2004, Glasgow, Scotland, United Kingdom. pp.258-268, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5499

Conference Proceedings

9. Advanced metal lift-off process using electron-beam flood exposure of single-layer photoresist

Minter, J. P. ; Ross, M. F. ; Livesay, W. R. ; Wong, S. S. ; Narcy, M. E. ; Marlowe, T.

Pub. info.:	Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1074-1082, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3678

10.

Conference Proceedings

10. 2K×2K molecular beam epitaxy HgCdTe detectors for the James Webb Space Telescope NIRCam instrument

Garnett, J. D. ; Farris, M. C. ; Wong, S. S. ; Zandian, M. ; Hall, D. N. B. ; Jacobson, S. ; Luppino, G. ; Parker, S. ; Dorn, D. ; Franka, S. ; Freymiller, E. ; McMuldroch, S.

Pub. info.:	Optical and infrared detectors for astronomy : 21-22 June 2004, Glasgow, Scotland, United Kingdom. pp.35-46, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5499

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Author: Wong, S. S.