1.

Conference Proceedings
Conference Proceedings
1. Grazing Incidence Small Angle X-ray Scattering Study On Low Dielectric Thin Films
Hsu, C. ; Lee, H. ; Liang, K.S. ; Jeng, U. ; Windover, D. ; Lu, T. ; Jin, C.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D5.23-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
2.

Conference Proceedings
Conference Proceedings
2. Real-Time X-Ray Characterization of Sputter Deposition of Tantalum Films
Lee, S. L. ; Mueller, J. ; Windover, D.
Pub. info.: Neutron and x-ray scattering as probes of multiscale phenomena : symposium held November 29-December 1, 2004, Boston, Massachusetts, U.S.A..  pp.113-118,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 840