1.

Conference Proceedings
Conference Proceedings
1. Using design intent to qualify and control lithography manufacturing [6156-41]
Vasek, J. ; Wilkinson, B. ; Reich, A. ; Garza, C. ; Zhao, J. ; Wiley, J. ; Poyastro, M. ; Troy, B. ; Nehmadi, Y. ; Abraham, Z.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61561B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. Combining OPC and design for printability into 65-nm logic designs
Lucas, K.D. ; Yuan, C.-M. ; Boone, R. ; Strozewski, K. ; Porter, J. ; Tian, R. ; Wimmer, K. ; Cobb, J. ; Wilkinson, B. ; Toublan, O.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.158-169,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
3.

Conference Proceedings
Conference Proceedings
3. Study of OPC for AAPSM reticles using various mask fabrication techniques
Hughes, G.P. ; Kamaruddin, D. ; Nakagawa, K.H. ; MacDonald, S. ; Wilkinson, B. ; West, C. ; Park, K.
Pub. info.: Optical Microlithography XVII.  pp.204-211,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
4.

Conference Proceedings
Conference Proceedings
4. Development of a complementary phase-shift mask process for 90-nm node technology
Wang, R. ; Philbin, C. ; Fu, C. -C. ; Wilkinson, B.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.575-586,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567