1.

Conference Proceedings
Conference Proceedings
1. A COMPARISON OF THE ELECTRICAL PROPERTIES OF RTP FORMED GATE OXIDES, REOXIDIZED-NITRIDED OXIDES AND NITROUS OXIDE BASED GATE DIELECTRICS
Meinecke, R. J. ; Wasserman, Y.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.397-402,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
2.

Conference Proceedings
Conference Proceedings
2. Application of Ripple Pyrometry on Integra Rapid Thermal CVD Cluster Tools
Xing, G. C. ; Wang, Z. H. ; Schietinger, C. ; Wasserman, Y. ; Sun, M. H.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.119-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
3.

Conference Proceedings
Conference Proceedings
3. RTP Based TiN Barrier Integrity for WF6 Processing During W-Plug Formation
Lee, C. Y. ; Yen, H. ; Hsia, S. T. ; Liu, D. ; Shah, N. ; Feldmeier, K. ; Wasserman, Y.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.383-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
4.

Conference Proceedings
Conference Proceedings
4. Emissivity-Independent Rapid Thermal Processing Using Radiation Shields
Timans, P. J. ; Morishige, R. N. ; Wasserman, Y.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.57-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
5.

Conference Proceedings
Conference Proceedings
5. Comparision of SiH4 and Si2H6 RTCVD Kinetics Using In Situ Spectroscopic Ellipsometry
Hu, Y. Z. ; Tay, S. P. ; Wasserman, Y. ; Zhao, C. Y. ; Irene, E. A.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.115-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470