1.

Conference Proceedings
Conference Proceedings
1. Design of a micro-Wankel rotary engine for MEMS fabrication
Jiang,K.C. ; Prewett,P.D. ; Ward,M.C.L. ; Tian,Y. ; Yang,H.
Pub. info.: MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK.  pp.54-60,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4407
2.

Conference Proceedings
Conference Proceedings
2. Polysilicon for everything? (Invited Paper)
Ward,M.C.L. ; McNie,M.E. ; Bunyan,R.J.T. ; King,D.O. ; Carline,R.T. ; Wilson,R. ; Gillham,J.P.
Pub. info.: Micromachined Devices and Components IV.  pp.298-306,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514