1.

Conference Proceedings

Conference Proceedings
Chung, D. ; Cooney, E., III. ; Cole, W. ; Locke, P. ; Luce, S. ; Megivern, C. ; Wachnik, R. ; Walton, E.
Pub. info.: Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium.  pp.1-8,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-9
2.

Conference Proceedings

Conference Proceedings
Andricacos, P.C. ; Parks, C. ; Cabral, C. ; Wachnik, R. ; Tsai, R. ; Maihotra, S. ; Locke, P. ; Fluegel, J. ; Horkans, J. ; Kwietniak, K. ; Uzoh, C. ; Rodbell, K.P. ; Gignac, L. ; Walton, E. ; Chung, D. ; Geffren, R.
Pub. info.: Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium.  pp.111-121,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-9
3.

Technical Paper

Technical Paper
Bread, J. ; Berrie, J. ; Buekholder, R. ; Dominek, A. ; Walton, E. ; Wang, N.
Pub. info.: NASA Technical Reports.  (NASA-CR-186466),  pp.1-48,  1989.  National Aeronautics and Space Adminstration
4.

Technical Paper

Technical Paper
Walton, E. ; Aebker, E. ; Mata, F. ; Reilly, C.
Pub. info.: NASA Technical Reports.  (NASA-CR-189455),  pp.1-78,  1991.  National Aeronautics and Space Adminstration