Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.2-5, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical interconnects in broadband switching architectures : 31 January-1 February, 1996, San Jose, California. pp.213-221, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.41-48, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.2-5, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA. pp.2-5, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.300-305, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering