1.

Conference Proceedings
Conference Proceedings
1. "Measurement of sidewall, line, and line-edge roughness with scanning probe microscopy"
Walch,K. ; Meyyappan,A. ; Muckenhirn,S. ; Margail,J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.726-732,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
2.

Conference Proceedings
Conference Proceedings
2. SPM characterizaton of anomalies in phase-shift mask and their effect on wafer features
Muckenhirn,S. ; Meyyappan,A. ; Walch,K. ; Maslow,M.J. ; Vandenberghe,G.N. ; Wingerden,J.Van
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.188-199,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344