1.

Conference Proceedings
Conference Proceedings
1. Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.101-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
2.

Conference Proceedings
Conference Proceedings
2. INFLUENCE OF MOLECULAR WEIGHT OF ORGANIC CONTAMINANTS UPON ADSORPTION BEHAVIORS ONTO SILICON SURFACES
Nagase, M. ; Kitano, M. ; Wakayama, Y. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.47-53,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
3.

Conference Proceedings
Conference Proceedings
3. Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.161-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473