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Conference Proceedings
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W. H. Hsieh ; H. J. Liu ; W. B. Wu ; C. L. Shin ; J. P. Lin
Pub. info.: |
Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6519 |
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2.
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Conference Proceedings
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C. F. Chiu ; C. L. Chen ; J. W. Lee ; W. B. Wu ; C. L. Shih ; F. Y. Chen ; J. P. Lin
Pub. info.: |
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6520 |
|
3.
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Conference Proceedings
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H. J. Liu ; W. H. Hsieh ; C. H. Yeh ; J. S. Wu ; H. W. Chan ; W. B. Wu ; F. Y. Chen ; T. Y. Huang ; C. L. Shih ; J. P. Lin
Pub. info.: |
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6520 |
|
4.
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Conference Proceedings
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T. Chin ; W. B. Wu ; C. L. Shih ; P. C. Fan ; G. B. Zvi
Pub. info.: |
Photomask technology 2008. 2 pp.712238-1-712238-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
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5.
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Conference Proceedings
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C. T. Hung ; C. P. Hsia ; T. S. Cheng ; C. Y. Huang ; W. B. Wu
Pub. info.: |
Lithography Asia 2008. 1 pp.71400M-1-71400M-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7140 |
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