1.

Conference Proceedings
Conference Proceedings
1. A Large Area Multi-Frequency Multi-Planar Coil Inductively Plas- ma Source
Yamada, N. ; Ventzek, P.L.G. ; Date, H. ; Sakai, Y. ; Tagashira, H.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.126-136,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. Simulation of Plasma Etch Process Control on Etching Time-Scales: Multi-Coil Control of an Inductively Coupled Plasma Source
Yang, J. ; Yamada, N. ; Ventzek, P.L.G. ; Sakai, Y. ; Date, H. ; Tagashira, H. ; Kitamori, K.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.233-244,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
3.

Conference Proceedings
Conference Proceedings
3. Control of Plasma Chemistry in an Ar/c-C4F8 Inductively Coupled Discharge
Rauf, S. ; Ventzek, P.L.G. ; Arunachalam, V.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.129-139,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
4.

Conference Proceedings
Conference Proceedings
4. Magnetic Field Configuration and Uniformity Issues in PVD Chambers
Ventzek, P.L.G. ; Hartig, M. ; Coronell, D.G. ; Arunachalam, V. ; Denning, D.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.266-273,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
5.

Conference Proceedings
Conference Proceedings
5. Integrated Modeling Investigation of Plasma Dielectric Etching Processes
Zhang, D. ; Rauf, S. ; Sparks, T.G. ; Ventzek, P.L.G.
Pub. info.: Plasma processing XIV : proceedings of the international symposium.  pp.61-70,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-17
6.

Conference Proceedings
Conference Proceedings
6. Simulations of Real-Time Two-coil Control of an Inductively Coupled Plasma for Etching Applications
Yamada, N. ; Ventzek, P.L.G. ; Sakai, Y. ; Tagashira, H.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.575-587,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2