1.

Conference Proceedings
Conference Proceedings
1. FTIR Analysis of a New High K Gate Material for MOCVD Applications
Reid, K. ; Mendicino, L. ; Cole, V. ; Brown, P. ; Vartanian, V.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.89-99,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. High Pressure Sampling Mass Spectrometry of Semiconductor Tool Process Emissions
Vartanian, V. ; Baker, B. ; Arnold, J. ; Quarmby, S. ; Platt, M.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.52-62,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
3.

Conference Proceedings
Conference Proceedings
3. Continuous Real-Time Detection of Molecular Fluorine (F2) Emitted as a By-Product Of CVD and Etch Processes
Laush, C. ; Vartanian, V. ; Mendicino, L. ; Brown, P.T.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.72-81,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
4.

Conference Proceedings
Conference Proceedings
4. Impact of Fluorine from NF3 Based Chamber Cleaning Processes
Brown, P.T. ; Mendicino, L. ; Vartanian, V.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.52-59,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
5.

Conference Proceedings
Conference Proceedings
5. Abatement of Greenhouse Gases Using Surface Wave Plasmas
Wofford, B. ; Vartanian, V. ; Beu, L. ; Lii, T. ; Worth, W.F. ; Hartz, C.L. ; Bevan, J.W.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.79-94,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
6.

Conference Proceedings
Conference Proceedings
6. Litmas Plasma Abatement Long-Term Reliability Test
Vartanian, V. ; Beu, L. ; Stephens, T. ; Rivers, J. ; Perez, B. ; Kiehlbauch, M. ; Tonnisand, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.9-20,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
7.

Conference Proceedings
Conference Proceedings
7. Point of Use Abatement for CVD Precursors and Reaction Products
Mendicino, L. ; Brown, P. ; Vartanian, V. ; Reid, K. ; Van Gompel, J.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.82-88,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
8.

Conference Proceedings
Conference Proceedings
8. EHS Concerns with Ozonated Water Spray Processing
McCormack, K. ; Barbee, K. ; Vartanian, V.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.108-121,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
9.

Conference Proceedings
Conference Proceedings
9. The Evaluation of Hexafluoro-1,3-Butadiene as an Environmentally Benign Dielectric Etch Chemistry in a Medium Density Etch Chamber
Chatterjee, R. ; Reif, R. ; Sparks, I. ; Vartanian, V. ; Goolsby, B. ; Mendicino, L.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.99-113,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
10.

Conference Proceedings
Conference Proceedings
10. Potential Cost of Ownership Reduction for a Nitride Furnace Point of Use Abatement Device
Goolsby, B. ; Vartanian, V. ; Mendicino, L. ; Davis, B. ; Rossow, M.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.77-86,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15