1.

Conference Proceedings
Conference Proceedings
1. INVITED: UNIFIED THEORY OF THERMAL SILICON OXIDE GROWTH
Uematsu, M. ; Kageshima, H. ; Shiraishi, K.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.578-591,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. Theory of Si Oxide Growth Rate Taking Account of Interfacial Si Emission*
Kageshima, H. ; Shiraishi, K. ; Uematsu, M.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.174-184,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
3.

Conference Proceedings
Conference Proceedings
3. PVT Measurements and Critical Parameters of Water
hanafusa, H. ; Kawai, K. ; Sato, H. ; Uematsu, M. ; Watanabe, K.
Pub. info.: Fluids, engineering, and safety.  pp.65-68,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 22(2)
4.

Conference Proceedings
Conference Proceedings
4. Oxidation simulation of silicon nanostructure on silicon-on-insulator substrates
Uematsu, M. ; Kageshiwa, H. ; Shiraisbi, K.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.407-412,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5
5.

Conference Proceedings
Conference Proceedings
5. INVITED: UNIFIED THEORY OF THERMAL SILICON OXIDE GROWTH
Uematsu, M. ; Kageshima, H. ; Shiraishi, K.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.578-591,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
6.

Conference Proceedings
Conference Proceedings
6. Attenuated phase-shifting mask in ArF lithography
Miyazaki, J. ; Uematsu, M. ; Nakazawa, K. ; Matsuo, T. ; Onodera, T. ; Ogawa, T.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.324-331,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
7.

Conference Proceedings
Conference Proceedings
7. Integration of multi-array sensors and support vector machines for the detection and classification of organophosphate nerve agents
Land, W.H. ; Sadik, O.A. ; Embrechts, M.J. ; Leibensperger, D. ; Wong, L. ; Wanekaya, A. ; Uematsu, M.
Pub. info.: Intelligent Computing: Theory and Applications.  pp.37-47,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5103