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16 results

Conference Proceedings

1. Environmentally stable chemically amplified resist

Kameyama,Y. ; Tomiyasu,H. ; Tsukamoto,M. ; Niinomi,T. ; Tanaka,Y. ; Fujita,J. ; Ochiai,T. ; Uedono,A. ; Tanigawa,S.

Pub. info.:	Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California. pp.238-247, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3049

Conference Proceedings

2. Study of Thermal Annealing of Vacancies in Ion Implanted 3C-SiC by Positron Annihilation

Ohshima,T. ; Uedono,A. ; Itoh,H. ; Abe,K. ; Suzuki,R. ; Ohdaira,T. ; Aoki,Y. ; Yoshikawa,M. ; Mikado,T. ; Okumura,H. ; Yoshida,S. ; Tanigawa,S. ; Nashiyama,I.

Pub. info.:	Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997. Part2 pp.745-748, 1998. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	264-268

Conference Proceedings

3. The Effect of Point Defects Introduced by Proton Irradiation on Positron Annihilation in Si

Che,Y.K. ; Konde,H. ; Kubota,T. ; Nakashima,H. ; Kawano,T. ; Uedono,A. ; Kurihara,T. ; Tanigawa,S.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.2 pp.925-928, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

Conference Proceedings

4. Moderation of Positrons Generated by an Electron Linac

Suzuki,R. ; Ohdaira,T. ; Mikado,T. ; Uedono,A. ; Ohgaki,H. ; Yamazaki,T. ; Tanigawa,S.

Pub. info.:	Positron annihilation, ICPA-11 : Proceedings of the 11th International Conference on Positron Annihilation, Kansas City, Missouri, USA, May 1997. pp.114-118, 1997. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	255-257

Conference Proceedings

5. Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals

Ikari,A. ; Haga,H. ; Yoda,O. ; Uedono,A. ; Ujihira,Y.

Pub. info.:	Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992. pp.225-230, 1993. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	117-118

Conference Proceedings

6. Oxygen Microclusters in Quenched Si Studied by Positron Annihilation

Uedono,A. ; Ujihira,Y. ; Ikari,A. ; Yoda,O.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.2 pp.1301-1304, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

Conference Proceedings

7. Oxygen Clusters in as-grown Cz-Si Crystals Probed by Positron Annihilation

Ikari,A. ; Kawakami,K. ; Haga,H. ; Uedono,A. ; Wei,L. ; Kawano,T. ; Tanigawa,S.

Pub. info.:	Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993. Pt.3 pp.1583-1588, 1994. Zurich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	143-147

Conference Proceedings

8. Vacancy-Oxygen Complexes in Si Probed by Positron Annihilation

Uedono,A. ; Kawano,T. ; Li,X.H. ; Wei,L. ; Tanigawa,Sh. ; Ikari,A. ; Kawakami,K. ; Haga,H. ; Itoh,H.

Pub. info.:	Positron annihilation : ICPA-10 : Proceedings of the 10th International Conference on Positron Annihilation, May 23-29, 1994, Beijing, China. Part1 pp.553-556, 1995. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	175-178

Conference Proceedings

9. Positron Lifetime Study on Semiconductor Thin Films

Suzuki,R. ; Ohdaira,T. ; Uedono,A. ; Ishibashi,S. ; Matsuda,A. ; Yoshida,S. ; Ishida,Y. ; Niki,S. ; Fons,P.J. ; Mikado,T. ; Yamazaki,T. ; Tanigawa,S. ; Cho,Y.K.

Pub. info.:	Positron annihilation, ICPA-11 : Proceedings of the 11th International Conference on Positron Annihilation, Kansas City, Missouri, USA, May 1997. pp.714-717, 1997. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	255-257

10.

Conference Proceedings

10. Increase of 14 at Melting Point Found in Polyethylene and Serious Thermal Hysteresis Found in Polypropylene

Tanaka,M. ; Takebe,K. ; Uedono,A. ; Ujihira,Y. ; Horie,K. ; Asanuma,T.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.3 pp.1737-1740, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

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Author: Uedono,A.