1.

Conference Proceedings
Conference Proceedings
1. Thermal Studies on Stress-Induced Void-Like Defects in Epitaxial-CoSi2 Formation
Ho, C. S. ; Pey, K. L. ; Tung, C. H. ; Tee, K. C. ; Prasad, K. ; Saigal, D. ; Tan, J. J. L. ; Wong, H. ; Lee, K. H. ; Osipowicz, T. ; Chua, S. J. ; Karunasiri, R. P. G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.109-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. Two Step O2/N2O Plasma Annealing for the Reduction of Leakage Current in Amorphous Ta2O5 Films
Lau, W. S. ; Perera, M. T. Chandima ; Han, T. ; Sandler, N. P. ; Tung, C. H. ; Sheng, T. T. ; Chu, P. K. ; Chong, T. C.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.501-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
3.

Conference Proceedings
Conference Proceedings
3. Microstructure Evolution and Breakdown Mechanism Studies in MOSFET with Ultra Thin Gate Dielectrics in Nanometer Technology ERA
Lu, C. Y. ; Tung, C. H. ; Pey, K. L.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.404-417,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
4.

Conference Proceedings
Conference Proceedings
4. In-chip overlay metrology [6152-40]
Ku, Y. S. ; Tung, C. H. ; Li, Y. P. ; Pang, H. L. ; Smith, N. P. ; Binns, L. ; Rigden, T. ; Reynolds, G. ; Fink, H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615214-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152