1.

Conference Proceedings
Conference Proceedings
1. Enhancement of hierarchical mask data design system (PROPHET)
Watanabe, T. ; Tsujimoto, E. ; Maeda, K. ; Fukuda, H.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.196-204,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
2.

Conference Proceedings
Conference Proceedings
2. Auxiliary pattern generation to cancel unexpected images at sidelobe overlap regions in attenuated phase-shift masks
Nakajo, K. ; Sakemi, J. ; Fukuda, H. ; Terasawa, T. ; Hasegawa, N. ; Tsujimoto, E.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.214-221,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748