1.

Conference Proceedings
Conference Proceedings
1. SURFACE CONTAMINATION LEVEL OF GaAs WAFERS TREATED WITH SOLUTIONS OF ORGANIC BASE MEASURED BY TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)
Shibaya, H. ; Kondo, H. ; Tomizawa, K.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.329-334,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of defects in surface Si near Si/BOX interface in SIMOX wafers
Sudou, M. ; Kainuma, M. ; Nakai, T. ; Tomizawa, K.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.119-124,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23