1.

Conference Proceedings
Conference Proceedings
1. Thick polysilicon surface-micromachined optically sensed accelerometer
Chen,Y.H. ; Wang,Y.Y. ; Tien,N.C.
Pub. info.: Silicon-based optoelectronics : 27-28 January 1999, San Jose, California.  pp.190-197,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3630
2.

Conference Proceedings
Conference Proceedings
2. Reconfigurable hardware mapping for accelerometer-based navigation applications
Arrigo,J.F. ; Anderson,P.M. ; Chau,P.M. ; Chen,Y.-H. ; Tien,N.C.
Pub. info.: Robotic and semi-robotic ground vehicle technology : 15-16 April 1998, Orlando, Florida.  pp.8-19,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3366
3.

Conference Proceedings
Conference Proceedings
3. Micro-optical filter using a polysilicon surface micromachining process
Asundi,A.K. ; Zheng,L.D. ; Tien,N.C. ; Chen,Z. ; Liu,A.Q.
Pub. info.: Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia.  pp.216-220,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3241
4.

Conference Proceedings
Conference Proceedings
4. MEMS actuators for silicon micro-optical elements
Tien,N.C. ; McCormick,D.T.
Pub. info.: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA.  pp.256-269,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4178
5.

Conference Proceedings
Conference Proceedings
5. Operating principles of an electrothermal vibromoter for optical switching applications
Pai,M. ; Tien,N.C.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.124-130,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
6.

Conference Proceedings
Conference Proceedings
6. New fabrication method for high-Q on-chip spiral inductor
Jiang,H. ; Yeh,J.-L.A. ; Tien,N.C.
Pub. info.: Micromachined Devices and Components V.  pp.153-159,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876
7.

Conference Proceedings
Conference Proceedings
7. Actuation of polysilicon surface-micromachined mirrors
Tien,N.C. ; Kiang,M.-H. ; Daneman,M.J. ; Solgaard,O. ; Lau,K.Y. ; Muller,R.S.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.53-59,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687