1.

Conference Proceedings
Conference Proceedings
1. In-line chemical shrink process for 70 nm contact hole patterns by the room-temperature electrostatic self-assembly
Gonsalves, K. E. ; Thiyagarajan, M. ; Dean, K.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.162-170,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Study of the effect of amine additives on LWR and LER [6153-44]
Houlihan, F. M. ; Rentkiewicz, D. ; Lin, G. ; Rahman, D. ; Mackenzie, D. ; Timko, A. ; Kudo, T. ; Anyadiegwu, C. ; Thiyagarajan, M. ; Chiu, S. ; Romano, A. ; Dammel, R. R. ; Padmanaban, M.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.615317-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
3.

Conference Proceedings
Conference Proceedings
3. Effects of material design on extreme ultraviolet (EUV) resist outgassing [6153-51]
Dean, K. R. ; Gonsalves, K. E. ; Thiyagarajan, M.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153