1.

Conference Proceedings
Conference Proceedings
1. Characterization of outgassing for EUV technology
Thirumala, V. ; Cao, H.B. ; Yueh, W. ; Choi, H. ; Golovkina, V. ; Wallace, J. ; Nealey, P.F. ; Thielman, D. ; Cerrina, F.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.765-772,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
2.

Conference Proceedings
Conference Proceedings
2. Modeling for sub-50-nm x-ray application with phase masks
Taylor, J.W. ; Malueg, D.H. ; Cerrina, F. ; Khan, M. ; Thielman, D.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.311-315,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374