1.

Conference Proceedings
Conference Proceedings
1. DECOMPOSITION OF POLY-Si/Si02 UNDER HYDROGEN PRE- BAKE IN A REDUCED PRESSURE EPITAXIAL REACTOR
Hong, M.Y. ; Theodore, N.D. ; Steele, J. ; See, Y-C.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.288-297,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. BEHAVIOR OF DOPANT-RELATED DEFETS IN A1GaAs SUPERLATTICES
Theodore, N.D. ; Mei, P. ; Schwarz, S.A. ; Carter, C.B. ; Palmstrom, C. ; Harbison, J.P. ; Florez, L.T.
Pub. info.: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.709-714,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 163
3.

Conference Proceedings
Conference Proceedings
3. CHARACTERIZATION OF ARSENIC-IMPLANTED AMORPHOUS SILICON
Knoch, L. ; Theodore, N.D. ; Tam, G. ; Pennell, R.
Pub. info.: Amorphous silicon technology, 1992.  pp.81-86,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 258
4.

Conference Proceedings
Conference Proceedings
4. LOW-RESISTIVITY AMORPHOUS SILICON FOR CONTACTS USING LOW-TEMPERATURE RAPID THERMAL ANNEALING
Knoch, L. ; Tam, G. ; Theodore, N.D. ; Pennell, R.
Pub. info.: Amorphous silicon technology, 1992.  pp.99-104,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 258
5.

Conference Proceedings
Conference Proceedings
5. Enhancement of Boron Activation in Shallow Junctions by Hydrogen
Vengurlekar, A. ; Ashok, S. ; Kalnas, C.E. ; Theodore, N.D.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.325-332,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
6.

Conference Proceedings
Conference Proceedings
6. Influence of Atomic Hydrogen on Nickel Silicide Formation
Vengurlekar, A. ; Balasubramanian, Satheesh ; Ashok, S. ; Theodore, N.D. ; Chi, D.Z.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.159-164,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
7.

Conference Proceedings
Conference Proceedings
7. Si3H8 Based Epitaxy of Biaxially Stressed Silicon Films Doped with Carbon and Arsenic for CMOS Applications
Bauer, M. ; Zollner, S. ; Theodore, N.D. ; Canonico, M. ; Tomasini, P. ; Nguyen, B.-Y. ; Arena, C.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.143-150,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
8.

Conference Proceedings
Conference Proceedings
8. BEHAVIOR OF DEFECTS RELATED TO INTERFACE-STRESSES IN MODEL SUBMICRON SOI STRUCTURE
Theodore, N.D. ; Carter,C.B. ; Arney, S.C. ; MavDonld, N.C.
Pub. info.: Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A..  pp.377-382,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 130