1.

Conference Proceedings

Conference Proceedings
Hattori, T. ; Nohira, H. ; Teramoto, Y. ; Watanabe, N.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.33-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
2.

Conference Proceedings

Conference Proceedings
Teramoto, Y. ; Sato, H. ; Bessho, K. ; Niimi, G. ; Shirai, T. ; Yamatani, D. ; Takemura, T. ; Yokoto, T. ; Paul, K. C. ; Kabuki, K. ; Miyauchi, K. ; Ikeuchi, M. ; Hotta, K. ; Yoshioka, M. ; Toyoda, K.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.349-354,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
3.

Conference Proceedings

Conference Proceedings
Teramoto, Y. ; Sato, H. ; Bessho, K. ; Miyauchi, K. ; Ikeuchi, M. ; Okubo, K. ; Yoshioka, M. ; Toyoda, K.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.767-775,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
4.

Conference Proceedings

Conference Proceedings
Teramoto, Y. ; Niimi,G. ; Yamatani, D. ; Joshima, Y. ; Bessho,K. ; Shirai,T. ; Takemura,T. ; Yokota, T. ; Yabuta,H. ; Paul, K. C. ; Kabuki, K. ; Miyauchi, K. ; Ikeuchi, M. ; Hotta,K. ; Yoshioka,M. ; Sato,H.
Pub. info.: Emerging Lithographic Technologies X.  pp.615147-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
5.

Conference Proceedings

Conference Proceedings
Teramoto, Y. ; Sato, H. ; Bessho, K. ; Shirai, T. ; Yamatani, D. ; Takemura, T. ; Yokota, T. ; Paul, K.C. ; Kabuki, K. ; Miyauchi, K. ; Ikeuchi, M. ; Okubo, K. ; Hotta, K. ; Yoshioka, M. ; Toyoda, K.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.935-942,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374